Resonating modes of vibrating microcantilevers in liquid
نویسندگان
چکیده
A study of nanomechanical cantilevers vibrating at various resonating modes in liquid is presented. Resonant frequency spectrum with 16 well resolved flexural modes is obtained. The quality factor increased from 1 at mode 1 to 30 at mode 16. The theoretical estimate of eigenfrequency using the Elmer–Dreier model F.-J. Elmer and M. Dreier, J. Appl. Phys. 81, 12 1997 and Sader’s extended viscous model C. A. Van Eysden and J. E. Sader, J. Appl. Phys. 101, 044908 2007 matched well with the experimental data. The apparent mass of the liquid comoved by the oscillating cantilevers decreased asymptotically with mode number. © 2008 American Institute of Physics. DOI: 10.1063/1.2838295
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تاریخ انتشار 2008